1

Research development of silicon MEMS gyroscopes: a review

Year:
2015
Language:
english
File:
PDF, 2.70 MB
english, 2015
7

Study on solving method for output signal of frequency resonant gyroscope

Year:
2017
Language:
english
File:
PDF, 1.84 MB
english, 2017
9

A method to measure the micro-capacitance for MEMS comb actuators

Year:
2011
Language:
english
File:
PDF, 741 KB
english, 2011
10

Frequency measurement study of resonant vibratory gyroscopes

Year:
2012
Language:
english
File:
PDF, 661 KB
english, 2012
24

Application of AZ4903 to production of stator windings

Year:
2008
Language:
english
File:
PDF, 163 KB
english, 2008
32

Theory and experimental research for the double ended tuning fork in MEMS

Year:
2016
Language:
english
File:
PDF, 383 KB
english, 2016